Modular surface mount manifold

ABSTRACT

An modular manifold system is provided for interconnecting fluid components of a fluid system in a reduced area. The system is comprised of a one or more bridge fittings having an internal fluid passageway which has an inlet end in fluid communication with an outlet port of a first fluid component, and an outlet end in fluid communication with an inlet port of a second fluid component. The bridge fittings may be mounted within a channel of a backing plate for structural support. An optional locator plate may be utilized which is mounted over the ends of the bridge fittings in order to align the inlet and outlet ports of the fluid components with the inlet and outlet ends of the bridge fittings. The bridge fittings may also be mounted to the locator plate in multiple directions forming multiple flow paths. Additionally, the bridge fittings may be stacked to form multiple layers where bridge fittings of one layer may be in fluid communication with bridge fittings of another layer. The invention may further comprise seals provided in a recess between the fluid ports and the mating bridge fittings ends.

FIELD OF THE INVENTION

[0001] The invention relates in general to manifolds for fluid systems,and more particularly, the invention relates to a modular gasdistribution system for use in high purity fluid systems and corrosivefluid systems such as the clean room environment used to manufacturesemiconductor wafers.

BACKGROUND OF THE INVENTION

[0002] This application claims the benefit of U.S. provisionalapplication No. 60/076,871 filed on Mar. 5, 1998.

[0003] To manufacture semiconductors, the industry uses various highpurity gases. These gases are controlled by systems made up of highpurity valves, regulators, pressure transducers, mass flow controllersand other components connected together by welding and high purity metalseal fittings. These connections are undesirable in many applicationsbecause they add additional time and cost for welding operations,unnecessary space between components and make it difficult to replace acomponent located between other components. Further, these systems aretypically custom designed and manufactured which make the manufacturingcosts and procurement of replacement parts quite expensive.

[0004] New modular manifold systems have been recently introduced intothe industry in order to overcome these problems. Typical components ofthese systems such as valves, pressure regulators and other typicalfluid components have been reconfigured so that their inlet and outletports and attachment mechanisms are compatible with surface mountmanifolds. These manifolds are typically comprised of modular blockswhich are machined of high purity metal and have machined internal flowpassageways. These prior art modular systems typically utilize ametallic seal between the component and a modular block face to ensurenear leak-free seal integrity. One objective of such systems is to usesurface mount standard configurations based upon industry standards topermit interchangeability of surface mount components.

[0005] One disadvantage to these type of prior art modular systems isthat the entire modular block is made of high purity metal. Thus moneyand natural resources are inefficiently utilized. Further, these blockcomponents also have higher manufacturing costs due to the complexity ofmachining multiple passageways of a single block as well as a higherrisk of expensive scrap being formed due to the manufacturingcomplexity. Further, the mating blocks require the use of mating sealstherebetween, which require additional manufacturing time, and furtherrequire proper installation and makeup torque of the fastener members inorder to ensure a leak-tight seal.

SUMMARY OF THE INVENTION

[0006] Thus it is desired that a modular manifold design be providedwhich eliminates the seals between modular mating blocks, dramaticallyreduces the amount of expensive material utilized, and results in asimpler and cheaper system to manufacture while providing a reducedsystem footprint or envelope which meets or surpasses the performance;integrity and reliability of existing systems.

[0007] The invention provides in one aspect a bridge fitting for use ina fluid manifold system for being in fluid communication with two ormore fluid components, such as valves, regulators, pressure transducers,mass flow controllers, and the like. The bridge fitting comprises afirst elbow, fitting connected to a second elbow fitting, with theconnected elbow fittings having an internal fluid passagewaytherethrough. The internal passageway of the bridge fitting has an inletend and an outlet end, with the inlet end in fluid communication with anoutlet port of the first fluid component, and the outlet end of thebridge fitting in fluid communication with an inlet end of a secondfluid component.

[0008] The invention provides in another aspect a bridge fitting for usein a fluid manifold system for being in fluid communication with threeor more fluid components, wherein one or more of said fluid componentshas a single port. The bridge fitting comprises a first and second elbowfitting having a respective end connected to a tee fitting. The teefitting is located between the elbow fittings, with each of the elbowfittings and the tee fittings having an internal fluid passageway influid communication with each other. The internal passageway of thefittings have an inlet end and a first and second outlet end, with theinlet end in fluid communication with an outlet port of the first fluidcomponent, and the outlet ends of the fluid passageway being in fluidcommunication with an inlet end of a second and third fluid component,respectively.

[0009] The invention provides in yet another aspect a modular fluidmanifold system for connecting with one or more surface mount type fluidcomponents having an inlet port and an outlet port, the modular systemcomprising: one or more bridge fittings having an internal fluidpassageway therethrough; the internal passageway of the bridge fittinghaving an inlet end for connecting to an outlet port of the first fluidcomponent, and an outlet end for connecting to an inlet port of thesecond fluid component, whereby the internal fluid passageway of thebridge fitting is in fluid communication with the first and second fluidcomponents when the system is assembled.

[0010] Finally, the invention provides a modular fluid manifold systemfor connecting with one or more fluid components comprising an inletport and one or more outlet ports. The manifold system comprises one ormore bridge fittings having an inlet end and an outlet end and aninternal passageway joining said ends therethrough. The system furtherincludes a locator plate having an upper surface for mounting the fluidcomponents thereon and a plurality of holes aligned with the inlet andoutlet ports of the fluid components. The locator plate has a lowersurface for mounting the bridge fittings thereto. The inlet end of eachof the bridge fittings are in fluid communication with an outlet port ofa fluid component, and an outlet end of each of the bridge fittings arein fluid communication with an inlet port of another fluid component.

[0011] These and other features and advantages of the invention willbecome apparent in the detailed description and claims to follow, takenin conjunction with the accompanying figures.

BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The invention may take physical form in certain parts andarrangements of parts, a preferred embodiment of which will be describedin detail in this specification and illustrated in the accompanyingdrawings which form a part hereof, and wherein:

[0013]FIG. 1 is a perspective view of the complete manifold assemblyshown with representative components and seals incorporating features ofthe subject invention;

[0014]FIG. 2 is an exploded perspective of a manifold assembly andrepresentative components and seals incorporating features of thesubject invention as shown in FIG. 1;

[0015]FIG. 3 is an exploded elevational view of a portion of themanifold of FIG. 2, showing one complete gas bridge located between twopartially illustrated gas bridges and showing an optional representativeseal;

[0016]FIG. 3a is a cross-sectional view of the assembled manifoldportion of FIG. 2;

[0017]FIG. 3b is a cross-sectional view of an alternative gas bridgeincorporating a tee fitting and an additional tube section, in additionto the two elbows and the tube section shown in the complete gas bridge8 illustrated in FIGS. 3 and 3a; and

[0018]FIG. 4 is a perspective view of a alternative manifold system ofthe present invention which incorporates multiple flow paths extendingin various directions.

DETAILED DESCRIPTION OF THE INVENTION

[0019] Referring now to the drawings wherein the drawings are for thepurposes of illustrating the preferred embodiments of the invention onlyand not for purposes of limiting same, a unique manifold system is shownin the. FIGS. 1-4. The inventions as shown and described in the Figuresare useful, for example, as part of a high purity modular gasdistribution system used in the manufacture of semiconductor devices orother fluid systems which must withstand corrosive fluids. The presentinvention is not limited to the use in high purity fluid systems, andmay be useful in any application relating to fluid flow control.

[0020] Now referring to the drawings and more particularly FIG. 1, amodular fluid manifold system 10 is shown assembled together with fluidflow control components such as valves 12, flow regulators 13, filters14 and the like. The fluid components may be utilized in conjunctionwith the invention, but are not part of the invention. The fluidcomponents 12-14 are preferably surface mount type components, and eachcomponent has an inlet port 16 and may additionally comprise one or moreoutlet ports 18 as shown in FIG. 3A, which allow fluid communication tothe fluid component. A series of fasteners 22 of the fluid componentspass through openings 24 in the base flanges 26 of the fluid componentsin order to secure the components to the modular manifold system 10.

[0021] The modular manifold system 10 of the present invention maycomprise one or more bridge fittings 50, an optional locator plate 30,an optional backing plate 40, optional end fittings 45, and optionalsealing elements 60. These elements are described in more detail, below.The bridge fittings 50, as shown in FIG. 3, are in the form of two elbowfittings 52 which are shown joined by an optional tubular extension 54connected to the respective ends of the elbow fittings 52 byconventional means such as by orbital welding. The elbow fittings 52have an interior fluid passageway 56 having an inlet end 58 and anoutlet end 62,64, with the inlet end 58 having a 90 degree orientationwith respect to the outlet end 62,64. The optional tubular extension 54has an internal fluid passageway which connects with the adjoining fluidpassageway of the two adjacent elbow end fittings 52, such that a Ushaped fluid passageway is formed within the interior of the bridgefitting 50, with the passageway having an inlet end 62 and an outlet end64. As shown in FIG. 3A, the inlet end 62 of the bridge fitting 50 is influid communication with a respective outlet opening 18 of a fluidcomponent 12, and the outlet end 64 of the bridge fitting 50 is in fluidcommunication with the inlet of an adjacent fluid component 13. Thus thebridge fitting 50, acts as a “bridge” to transfer fluid between adjacentfluid components such as 12,13 without the need for metal to metal sealsbetween adjacent bridge fittings 50, which is typically required by themating of adjacent prior art modular blocks. It is preferred that thebridge fitting 50 be comprised of stainless steel such as 316 or SCQ, orother material suitable for use in conjunction with semiconductorprocessing fluids. For typical industrial applications, any suitablematerial such as plastic or metal would work for the invention.

[0022] As shown in FIG. 1, the modular system 10 may also comprise endfittings 45, which comprise an elbow fitting having a 90 degree internalpassageway connected to a standard fitting 46, such as a standardVCR-type fitting or other suitable fitting for connecting with a fluidline. The end fitting 45 may be utilized as an inlet fitting or anoutlet fitting which, mates with the fluid line (not shown). Thus, theoutlet or inlet end of the elbow fitting is connected to the respectiveinlet or outlet end of a fluid component. It is preferred that the endfittings 45 be comprised of stainless steel, 316 stainless, SCQstainless or other material suitable for use in conjunction withsemiconductor processing fluids. For typical industrial applications,the end fittings 45 may be comprised of any suitable material such asplastic or metal.

[0023] The modular manifold system 10 of the present invention mayfurther optionally comprise a backing plate 40. The backing plate 40 maycomprise a flat plate, but it preferably has an interior groove orchannel 42 for receiving and securing a plurality of bridge fittings 50and end fittings 45 therein. Each elbow fitting 52 of the bridge fitting50 and the end fitting 45, has an exterior shaped body of a precisedimension which mates with the shape of the groove or channel 42. It ispreferred but not required that the external shape of the elbow fitting52 be rectangular or square. It is also preferred that the internal sidewalls 44 forming the channel 42 have a suitable dimension for closelyreceiving a square shaped body, or that two of the opposed side wallshave an appropriate dimension for receiving a rectangular shaped body.The invention is not limited to the above mentioned shapes, as anycomplementary shaped channel with respect to the shaped body of theelbow fitting 52 would work for the invention. The backing plate 40 maybe comprised of any suitable material such as metal, but it ispreferably made of a low-cost lightweight material such as aluminum.

[0024] In one embodiment of the invention (not shown), the channel 42 isof a sufficient depth such that the bridge fittings 50 and the endfittings 45 can be completely received within the channel 42 such that arecess is formed (not shown) for receiving a seal 60 between the inlet62 and outlet 64 of the bridge fittings and the opposed channel walls44. In order to assemble the system in this embodiment, the bridgefittings 50 are inserted within the channel 42 of the backing plate 40,such that the bridge fittings 50 are spaced to have minimal clearancebetween adjoining bridge fittings 52. Next, the inlet and outlet portsof the fluid components 12-14 are carefully aligned with the respectiveoutlet and inlet ports of the pertinent bridge fittings. For example, aninlet end of a first bridge fitting 50 is aligned for fluidcommunication with an outlet of a first fluid component. Next, theoutlet end of the first bridge fitting 50 is aligned with the inlet of asecond fluid component which is adjacent to the first fluid component.After the inlet and outlet ports are carefully aligned, the fasteners 22are inserted through holes 24 of the flanges 26 of the fluid componentsand into mating holes. (not shown) of the backing plate 40, such thatthe fluid components are secured to the backing plate 40.

[0025] It is preferable that the manifold system 10 further compriseseals 60, which are received between the mating inlet/outlet ports ofthe bridge fittings 50 and the fluid components. The seals 60 may bemade of any suitable material such as elastomer, plastic, rubber orpolymer material and preferably, a soft metal such as nickel. C sealsmay also be used, as well as composite seals to name additionalexamples. Other seal technologies which may used in conjunction with theinvention will be readily apparent to those ordinarily skilled in theart.

[0026] In a second embodiment of the invention as illustrated in FIGS.2, 3 and 3A, an optional locator plate 30 may be utilized with theinvention. The locator plate 30 has a plurality of holes aligned toreceive the ends 62,64 of the bridge fittings 50 therein. The ends ofthe bridge fittings 50 are preferably slightly shorter than thethickness of the locator plate 30 such that a recess is formed forreceiving a seal 60 therein. The locator plate 30 additionally has holes32 aligned for receiving fasteners 22 therein. Thus in order to assemblethe system pursuant to the second embodiment of the invention, thebridge fittings are placed within the channel 42 of the backing plate40, and then the holes of the locator plate are aligned with the inletand outlet end of the bridge fittings 50. The locator plate is thenlowered into position such that the ends of bridge fittings 50 areinserted through the aligned holes 34 of the locator plate 30. Fasteners36 are then inserted through aligned holes 38 of the backing plate forreception into aligned holes 39 of the locator plate 30. Lastly, thefluid components 12-14 are then secured to the locator plate 30 usingfasteners 22.

[0027] An alternative embodiment of a bridge-tee fitting 70 is shown inFIG. 3b. This bridge fitting 70 may be used in conjunction with threeadjacent fluid components, wherein the middle fluid component has onlyone inlet port, e.g., a pressure transducer. The bridge fitting 70 iscomprised of two elbow fittings 52, each having an internal fluidpassageway in fluid communication with a tee fitting 72. The tee fitting72 has an inlet end 74, and two outlet ends 76, 78. Outlet end 76 of thetee fitting 70 is in fluid communication with the inlet of a single portfluid component such as a pressure transducer. The outlet end 78 of thetee fitting is in fluid communication with the outlet end 80 of thebridge fitting. Thus the bridge tee fitting 70 has an inlet end 82 andtwo outlet ends 76 and 80, and may be used to “bridge” or transfer theflow between three adjacent fluid components, wherein the middle fluidcomponent has only a single port.

[0028]FIG. 4 shows yet another embodiment of a locator plate 80 designedfor use with fluid flowing in multiple flow paths A, B, C and D. Inorder to better illustrate the invention, the backside of the locatorplate is shown with respect to the bridges 50 (i.e., the opposite ofFIG. 2). The arrangement of the bridges 50 within the holes 82 of thelocator plate allow for the combination or mixing of fluids from one ormore flow paths. Thus as shown in FIG. 4, four independent flow pathsare shown (A, B, C and D) which are mixed together in desiredproportions by fluid components (not shown) which result in the fluidoutlet 86 of the system to be comprised of the fluids A, B, C and Dmixed in a desired proportion. This is accomplished by using a fluidcomponent such as a valve having a three port configuration (atlocations 84) in order to allow for the mixture of the different fluidsfrom separate flow paths. Note that the bridge fittings 50 are combinedin a “pegboard” style arrangement in order to achieve the desired resultas described above. Thus bridges 50 are used to interlink or join theseparate flow paths in order to achieve the fluid mixing, without theneed for any specially adapted components. This is a distinct advantageover prior art block type modular designs, as a special block havingthree ports would be needed.

[0029] In this embodiment of the invention, the locator plate 80 may beused to both as a support for the bridges 50 and as a “locator” withoutthe need for a support plate. The bridge fittings 50 may furthercomprise a threaded end (not shown) which can be inserted into alignedthreaded holes 82 of the locator plate 80. The ends 62,64 of the bridgefittings 50 may also be press fit into the aligned holes 82 of thelocator plate 80 or be attached by retainer clips (not shown) to thelocator plate. Other attachment means may be readily apparent to thoseordinarily skilled in the art.

[0030] In this embodiment of the invention, the ends 62,64 of the bridgefittings 50 may vary in height, with a height sufficient to allowmultiple layers of bridge fittings (not shown). This cross layer featurewould be useful, for example, if it were desired to provide purge gas inLine A to the other gas lines B, C and D. In order to accomplish this, amodified bridge fitting 50 would be needed which would additionallycomprise a tee fitting for mating with the bridge fitting of an upperlayer. The tee fitting would be located between the elbow fittings asshown in FIG. 3b, and have an internal fluid passageway in communicationwith the internal fluid passageways of the elbow fittings. However,unlike FIG. 3B, the opening of the tee fitting would be 180 degreesopposite of the openings of the elbow fittings in order to mate with thetee fitting of a bridge fitting located in another layer. Thus thisembodiment of the invention would result in a fluid manifold systemhaving multiple fluid flow paths, with said paths being capable ofextending in multiple directions. Further, this embodiment allows formultiple or three dimensional layering of gas flow paths, wherein thefluid flow paths of one layer may be in fluid communication with thefluid flow path of another layer(s).

[0031] In summary, the invention provides a bridge fitting which may beused to form a gas or fluid flow path in conjunction with fluidcomponents which are preferably surface mount components. These bridgefittings eliminate the need for mating seals needed between adjacentblocks of the prior art, and they are much simpler and cheaper tomanufacture. Further, the invention provides for easy installation ofmultiple fluid flow paths and fluid components in multiple directionsand layers. The invention also provides for the interchangeability offluid components while allowing easy access to the components for easeof maintenance.

[0032] While the preferred embodiments of the invention has beenillustrated and described, it should be understood that variations willbecome apparent to those skilled in the art. Accordingly, the inventionis not limited to the specific embodiments illustrated and describedherein, but rather the true scope and spirit of the invention are to bedetermined by reference to the appended claims.

I claim:
 1. A bridge fitting for use in a fluid manifold system forbeing in fluid communication with two or more fluid components, such asvalves, regulators, pressure transducers, mass flow controllers, and thelike, the bridge fitting comprising: a first elbow fitting connected toa second elbow fitting, with said connected elbow fittings having aninternal fluid, passageway therethrough; said internal passageway ofsaid bridge fitting having an inlet end and an outlet end, with saidinlet end in fluid communication with an outlet port of the first fluidcomponent, and said outlet end of said bridge fitting in fluidcommunication with an inlet port of a second fluid component.
 2. Thebridge fitting of claim 1 further comprising a plurality of metallicseals interposed between and sealing the internal passageway of thebridge fitting with the port of the fluid component.
 3. The bridgefitting of claim 1 wherein the bridge fitting is made of stainless steelmaterial.
 4. A bridge fitting for use in a fluid manifold system forbeing in fluid communication with three or more fluid components,wherein one or more of said fluid components has a single port, thebridge fitting comprising: a first and second elbow fitting having arespective end connected to a tee fitting; said tee fitting beinglocated between-said elbow fittings; each of said elbow fittings andsaid tee fittings having an internal fluid passageway in fluidcommunication with each other; said internal passageway of said fittingshaving an inlet end and a first and second outlet end, with said inletend in fluid communication with an outlet port of the first fluidcomponent, and said outlet ends of said fluid passageway being in fluidcommunication with an inlet port of a second and third fluid component,respectively.
 5. A modular fluid manifold system for connecting with oneor more surface mount type fluid components having an inlet port and anoutlet port, the modular system comprising: one or more bridge fittingshaving an internal fluid passageway therethrough; said internalpassageway of said bridge fitting having an inlet end for connecting toan outlet port of the first fluid component, and an outlet end forconnecting to an inlet port of the second fluid component, whereby saidinternal fluid passageway of said bridge fitting is in fluidcommunication with said first and second fluid components when thesystem is assembled.
 6. The modular system of claim 5 furthercomprising: a backing plate for supporting said bridge fittings in aclosely spaced manner and mounting said fluid components thereon,wherein said backing plate supports and connects said bridge fittings tosaid fluid components.
 7. The modular system of claim 5 wherein saidbacking plate further comprises a groove for insertion of said bridgefittings therein in a closely spaced manner.
 8. The modular system ofclaim 5 further comprising one or more seals for sealing the connectionbetween said ends of the bridge fittings and the ports of the fluidcomponents.
 9. The modular system of claim 5 further comprising alocator plate mounted between said fluid components and said backingplate; said locator plate further comprising aligned holes for mountingsaid fluid components thereon; said locator plate having port holesaligned for receiving said inlet and outlet ends of said bridge fittingstherein such that said inlet and outlet ports of said components are influid communication with said inlet and outlet ends of said bridgefittings.
 10. The modular system of claim 9 wherein a recess forreceiving a gasket is provided between the locator plate upper surfaceand the inlet and outlet ends of said bridge fittings.
 11. The modularsystem of claim 10 wherein said gasket is metal.
 12. A modular fluidmanifold system for connecting with one or more fluid componentscomprising an inlet port and one or more outlet ports, the manifoldsystem comprising: one or more bridge fittings having an inlet end andan outlet end and an internal passageway joining said ends therethrough;a locator plate having an upper surface for mounting said fluidcomponents thereon and a plurality of holes aligned with the inlet andoutlet ports of said fluid components; said locator plate having a lowersurface for mounting said bridge fittings thereto; said inlet end ofeach of said bridge fitting being in fluid communication with an outletport of a fluid component, and an outlet end of each of said bridgefittings being in fluid communication with an inlet port of anotherfluid component.
 13. The modular system of claim 12 wherein a recess forreceiving a gasket is provided between the locator plate upper surfaceand the inlet and outlet ends of said bridge fittings.
 14. The modularsystem of claim 13 wherein said gasket is metal.
 15. The modular systemof claim 12 wherein retaining clips are provided to secure said bridgefittings to said locator plate.
 16. The modular system of claim 12wherein said ends of said bridge fittings are press fit into said holesof said locator plate.
 17. The modular system of claim 12 wherein one ormore of said bridge fittings further comprise a tee fitting locatedbetween a first and second elbow fitting; said tee fitting and saidelbow fittings having an internal fluid passageway in fluidcommunication with each other; said tee fitting having a port oppositeof said elbow fitting ports, and aligned to mate with a bridge fittingof another layer.